Optical system and method of use

US8462315B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventor

• Olaf Conradi · Sonthofen, DE

Key dates

• Filing date: Apr 30, 2009
• Grant date: Jun 11, 2013
• Expiry date: May 28, 2030

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/70891
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A method for improving imaging properties of an optical system and an optical system of this type having improved imaging properties are described. The optical system can have a plurality of optical elements. In some embodiments, an optical element is positioned and/or deformed by mechanical force action and by thermal action. In certain embodiments, one optical element is positioned and/or deformed by mechanical force action and another optical element is deformed by thermal action.