Inventor · Sonthofen, DE

Olaf Conradi

19Patents
3h-index
40Co-inventors
56Inventor score

Filing activity: May 24, 2006 → Jan 24, 2017

Most-cited inventions

PatentTitleAreaCited byStatus
US7830611B2 Projection objective of a microlithographic projection exposure apparatus Physics 17 Active
US9442381B2 Method of operating a projection exposure tool for microlithography Physics 4 Active
US7990622B2 Projection objective of a microlithographic projection exposure apparatus Physics 3 Active
US9146475B2 Projection exposure system and projection exposure method Physics 3 Active
US8462315B2 Optical system and method of use Physics 2 Active
US7777963B2 Method for improving the imaging properties of a projection objective, and such a projection objective Emerging Cross-Sectional Technologies 2 Expired
US8947633B2 Optical system and method of use Physics 1 Active
US9069263B2 Method for improving the imaging properties of a projection objective, and such a projection objective Emerging Cross-Sectional Technologies 1 Active
US8325323B2 Method and system for correcting image changes Physics 1 Active
US9097984B2 Microlithography projection objective Physics 1 Active
US7808615B2 Projection exposure apparatus and method for operating the same Physics 1 Active
US10241423B2 Method of operating a projection exposure tool for microlithography Physics 0 Active
US9366977B2 Semiconductor microlithography projection exposure apparatus Physics 0 Active
US9581813B2 Method for improving the imaging properties of a projection objective, and such a projection objective Emerging Cross-Sectional Technologies 0 Active
US10281824B2 Microlithography projection objective Physics 0 Active
US9823579B2 Optical system and method of use Physics 0 Active
US9606446B2 Reflective optical element for EUV lithography and method of manufacturing a reflective optical element Physics 0 Active
US9690203B2 Method for adjusting an illumination setting Physics 0 Active
US8773638B2 Microlithographic projection exposure apparatus with correction optical system that heats projection objective element Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.