Systems and methods for determining resonant frequency and quality factor of overdamped systems
US8464571B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 22, 2010 |
| Grant date | Jun 18, 2013 |
| Priority date | — |
| Expiry date | Sep 17, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P21/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A calibration system for a MEMS system having at least one overdamped motion axis includes a measurement module for determining a location of a pole of a MEMS device in the overdamped motion axis, a closed-loop feedback system configured to change a first location of the pole to a second location of the pole, and a computation module for calculating a resonant frequency and/or a quality factor using the first and the second location of the pole as determined by the measurement module. The calibration system further includes a calibration module for calibrating the MEMS system based on the calculated resonant frequency and/or the calculated quality factor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.