Underlayer coating composition and processes thereof
US8465902B2 · kind B2 · utility
6Cited by
22References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 8, 2011 |
| Grant date | Jun 18, 2013 |
| Priority date | — |
| Expiry date | May 17, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/11
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The invention relates to an underlayer coating composition comprising a polymer, where the polymer comprises at least one hydroxyaromatic unit in the backbone of the polymer phenol which has a pendant group comprising a fluoro or iodo moiety, and at least one unit comprising an aminoplast. The invention further relates to a process for forming an image using the composition, especially for EUV.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.