Patent · US Active

Pattern generation systems and high bandwidth focus control system with suppressed reaction forces and noise

US8467117B2 · kind B2 · utility

0Cited by

12References

39Claims

0Family size

Assignee

MICRONIC MYDATA AB · SE

Inventors

Jonas Walther · Solna, SE
Torbjorn Hedevarn · Stockholm, SE

Key dates

Filing date	Sep 1, 2010
Grant date	Jun 18, 2013
Priority date	—
Expiry date	Sep 8, 2031

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70766
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A pattern generation system includes an optical system and a rotor. The optical system is configured to project a laser image onto an optical scanner. The rotor has a plurality of optical arms arranged at a first angle relative to one another, and further includes the optical scanner. The laser image is sequentially reflected by the optical scanner into each of the plurality of optical arms of the rotor to generate a pattern on a workpiece.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.