Measurement tool monitoring using fleet measurement precision and tool matching precision analysis
US8467993B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 14, 2010 |
| Grant date | Jun 18, 2013 |
| Priority date | — |
| Expiry date | Jul 30, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B23/0237
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A method for monitoring a fleet comprising a plurality of measurement tools includes collecting data for a current time interval from the fleet by a data collection module; and performing fleet measurement precision (FMP)/tool matching precision (TMP) analysis on the collected data by a FMP/TMP analysis module, wherein FMP/TMP analysis comprises determining a TMP for each of the plurality of measurement tools using a static and a dynamic benchmark measuring system (BMS); and determining a FMP for the fleet using the static and the dynamic BMS; and determining if the FMP is above a predetermined threshold by a fleet improvement module, and in the event the FMP is above the predetermined threshold, identifying at least one tool of the plurality of tools as poorly performing based on the TMPs; and flagging the identified at least one tool for improvement.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.