Imprint method, computer storage medium and imprint apparatus
US8468943B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 25, 2010 |
| Grant date | Jun 25, 2013 |
| Priority date | — |
| Expiry date | Aug 25, 2030 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB29K2105/0002
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
The present invention provides a method for applying an application liquid between a template and a substrate, and transferring the transfer pattern onto the application liquid. The template is inclinedly arranged with respect to the substrate in a manner that a first distance between a first end portion of the template and the substrate is a distance that causes a capillary action of the application liquid to occur, and a second distance between a second end portion of the template that opposes the first end portion and the substrate is a distance that does not cause the capillary action of the application liquid to occur. Thereafter, the application liquid is supplied from an outer side of the first end portion to the first end portion. Thereafter, the second end portion and the substrate are relatively moved so that the second distance becomes equal to the first distance.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.