Monolithic electro-optical polymer infrared focal plane array
US8471204B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Dec 23, 2010 |
| Grant date | Jun 25, 2013 |
| Priority date | — |
| Expiry date | Nov 30, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K85/215
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In one embodiment, a dual-band focal plane array includes a readout circuit (ROIC), and a plurality of electro-optical (EO) polymer pixels for absorbing visible and/or short wave infrared (SWIR) radiation, each of the EO polymer pixels electrically coupled to the ROIC. The detector further includes a plurality of microbolometers for detecting long wave infrared (LWIR) radiation, each microbolometer electrically coupled to the ROIC via contact legs disposed between adjacent microbolometers and between adjacent EO polymer pixels. A method of fabricating a focal plane array is also provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.