Integrated circuit sample preparation for alpha emission measurements
US8471215B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 6, 2012 |
| Grant date | Jun 25, 2013 |
| Priority date | — |
| Expiry date | Dec 6, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2223/626
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Test samples for use in conducting integrated circuit alpha particle emissions testing, processes for preparing test samples for use in conducting integrated circuit alpha particle emissions testing, and processes for conducting integrated circuit alpha particle emissions testing using the test samples, are described. The approach takes into account the effects of the relative physical positions of the respective components within a final integrated circuit package, and takes into account the effect of contamination of individual components or of the integrated circuit package as a whole due to conditions and/or processes performed during the production process. The described approach relates to test sample preparation and integrated circuit alpha particle emissions testing for integrated circuits in which the alpha particle emission levels are extremely low, i.e., in the ultra low alpha region, for example, alpha particle emissions less than 0.002 cph/cm2.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.