Patent · US Active

Compound, method for preparing the compound and resist composition containing the compound

US8476473B2 · kind B2 · utility

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1References
3Claims
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Key dates

Filing dateSep 1, 2009
Grant dateJul 2, 2013
Priority date—
Expiry dateNov 1, 2031

Classification

  • Technology area (CPC C)Chemistry; Metallurgy
  • CPC primaryC07C2603/74
  • WIPO fieldOrganic fine chemistry
  • WIPO sectorChemistry

Abstract

A compounds represented by the Formula (I) or the Formula (I′).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.