MEMS device and deformation protection structure therefor and method for making same
US8479576B2 · kind B2 · utility
3Cited by
4References
11Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 8, 2011 |
| Grant date | Jul 9, 2013 |
| Priority date | — |
| Expiry date | Dec 7, 2031 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49155
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention discloses a MEMS (Micro-Electro-Mechanical System, MEMS) device with a deformation protection structure. The MEMS device is located on a substrate, and it includes: a movable part; and a deformation protection structure, which has: a fixed plug, which is fixed on the substrate; multiple metal layers, including a top metal layer; and multiple plugs connecting the multiple metal layers. From top view, the top metal layer overlaps a portion of the movable part, and from cross section view, the bottom surface of the top metal layer is higher than the top surface of the movable part by a predetermined distance.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.