Micro-electro-mechanical-system temperature sensor
US8480302B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 28, 2010 |
| Grant date | Jul 9, 2013 |
| Priority date | — |
| Expiry date | Sep 8, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01K5/52
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention provides a micro-electro-mechanical-system (MEMS) temperature sensor that employs a suspended spiral comprising a material with a positive coefficient of thermal expansion. The thermal expansion of the suspended spiral is guided to by a set of guideposts to provide a linear movement of the free end of the suspended spiral, which is converted to an electrical signal by a set of conductive rotor azimuthal fins that are interdigitated with a set of conductive stator azimuthal fins by measuring the amount of capacitive coupling therebetween. Real time temperature may thus be measured through the in-situ measurement of the capacitive coupling. Optionally, the MEMS temperature sensor may have a ratchet and a pawl to enable ex-situ measurement.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.