Method for manufacturing a micromechanical component, and micromechanical component

US8481427B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Hans Artmann · Magstadt, DE
• Andrea Urban · Stuttgart, DE
• Arnim Hoechst · Lörrach, DE

Key dates

• Filing date: Apr 27, 2006
• Grant date: Jul 9, 2013
• Expiry date: Nov 7, 2028

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T428/24562
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

A micromechanical method for manufacturing a cavity in a substrate, and a micromechanical component manufactured with this method. In this method, in a first step a first layer is produced on or in a substrate. At least one second layer is then applied onto the first layer. An access hole is produced in this second layer. Material of the first layer and of the substrate can be dissolved out through this hole, so that a cavity is produced in the substrate beneath at least a portion of the second layer. This second layer above the cavity can subsequently be used as a membrane. In addition, the possibility also exists of depositing further layers onto the second layer, only the totality of which layers constitutes the membrane. The material of the first layer is selected so that dissolving out the material of the first layer produces a transition edge in the first layer, which edge at is at a predefinable angle between the substrate and the second layer.