Scanning electron microscope
US8481935B2 · kind B2 · utility
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4References
11Claims
0Family size
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Key dates
| Filing date | Jul 25, 2011 |
| Grant date | Jul 9, 2013 |
| Priority date | — |
| Expiry date | Jul 25, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/30461
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A scanning electron microscope having a charged particle beam that when in a state being irradiated toward a sample, a voltage is applied to the sample so that the charged particle beam does not reach the sample. The scanning electron microscope also detects information on a potential of a sample using a signal obtained, and a device for automatically adjusting conditions based on the result of measuring.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.