Patent · US Active

Driving switches of a plasma load power supply

US8482205B2 · kind B2 · utility

6Cited by

60References

17Claims

0Family size

Assignee

HUETTINGER Elektronik GmbH + Co. KG · DE

Inventors

Thomas Kirchmeier · Teningen, DE
Michael Glueck · Schreiber, CA
Hans-Juergen Windisch · Ehrenkirchen, DE
Hanns-Joachim Knaus · Emmendingen, DE

Key dates

Filing date	Jan 14, 2010
Grant date	Jul 9, 2013
Priority date	—
Expiry date	Jan 14, 2030

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY02B20/00
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

Operation of a plasma supply device having at least one switching bridge with at least two switching elements, and configured to deliver a high frequency output signal having a power of >500 W and a substantially constant fundamental frequency >3 MHz to a plasma load is accomplished by determining at least one operating parameter, at least one environmental parameter of at least one switching element and/or a switching bridge parameter, determining individual drive signals for the switching elements taking into account the at least one operating parameter, the at least one environmental parameter and/or the switching bridge parameter, and individually driving the switching elements with a respective drive signal.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.