Substrate processing apparatus
US8482426B2 · kind B2 · utility
0Cited by
12References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 23, 2010 |
| Grant date | Jul 9, 2013 |
| Priority date | — |
| Expiry date | Aug 23, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67253
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
It is intended to provide a substrate processing apparatus capable of reliably informing a running state of the apparatus. The substrate processing apparatus having a signal indicator for indicating the running state, including a signal indicator capable of setting at least one operation condition under which the signal indicator operates as well as of operating under anyone of a plurality of operation conditions and a display unit capable of displaying that a cause of the operation is anyone of the operation conditions during the operation of the signal indicator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.