Patent · US Active

Method for cost-efficient manufacturing diamond tips for ultra-high resolution electrical measurements and devices obtained thereof

US8484761B2 · kind B2 · utility

1Cited by

1References

23Claims

0Family size

Assignee

IMEC · BE

Inventors

Thomas Hantschel · Houtvenne, BE
Wilfried Vandervorst · Mechelen, BE
Kai Arstila · Leuven, BE

Key dates

Filing date	Jun 11, 2009
Grant date	Jul 9, 2013
Priority date	—
Expiry date	Oct 7, 2030

Classification

Technology area (CPC G)Physics
CPC primaryG01Q70/16
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

An atomic force microscopy probe configuration and a method for manufacturing the same are disclosed. In one aspect, the probe configuration includes a cantilever, and a planar tip attached to the cantilever. The cantilever only partially overlaps the planar tip, and extends along a longitudinal direction thereof. The planar tip is of a two-dimensional geometry having at least one corner remote from the cantilever, which corner during use contacts a surface to be scanned.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.