Method of joining components for a composite showerhead electrode assembly for a plasma processing apparatus
US8484846B2 · kind B2 · utility
507Cited by
11References
15Claims
0Family size
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Key dates
| Filing date | Feb 23, 2012 |
| Grant date | Jul 16, 2013 |
| Priority date | — |
| Expiry date | Feb 26, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T156/10
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A showerhead electrode for a plasma processing apparatus includes an interface gel between facing surfaces of an electrode plate and a backing plate. The interface gel maintains thermal conductivity during lateral displacements generated during temperature cycling due to mismatch in coefficients of thermal expansion. The interface gel comprises, for example, a silicone based composite filled with aluminum oxide microspheres. The interface gel can conform to irregularly shaped features and maximize surface contact area between mating surfaces. The interface gel can be pre-applied to a consumable upper electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.