Patent · US Active

Sensor system, method for operating a sensor system, and method for manufacturing a sensor system

US8485041B2 · kind B2 · utility

4Cited by

1References

15Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Marcus Ahles · Pfullingen, DE
Hubert Benzel · Neckartenzlingen, DE
Heribert Weber · Leverkusen, DE

Key dates

Filing date	Jul 10, 2009
Grant date	Jul 16, 2013
Priority date	—
Expiry date	Nov 2, 2029

Classification

Technology area (CPC G)Physics
CPC primaryG01L13/025
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A sensor system, e.g., a pressure sensor system, includes a substrate having at least one trench on a first side. The trench is provided for forming a first diaphragm region on a second side opposite from the first side. In addition, a second diaphragm region and a cavern are integrated into the material of the first diaphragm region.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.