Patent · US Active

Closed chamber with fluid separation feature

US8485204B2 · kind B2 · utility

7Cited by

5References

13Claims

0Family size

Assignee

Lam Research Corporation · US

Inventors

Rainer Obweger · Lind im Drautal, AT
Andreas Gleissner · Radenthein, AT

Key dates

Filing date	May 25, 2010
Grant date	Jul 16, 2013
Priority date	—
Expiry date	May 12, 2031

Classification

Technology area (CPC H)Electricity
CPC primaryH01L21/68785
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

Selective recovery of excess process fluid from within a closed process chamber is achieved by providing a magnetically drive ring chuck and at least one process fluid collector within the closed process chamber, with the ring chuck and the fluid collector being vertically movable relative to each other.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.