Patent · US Active

Particle beam microscope and method for operating the particle beam microscope

US8487252B2 · kind B2 · utility

5Cited by

8References

26Claims

0Family size

Assignee

Carl Zeiss NTS GmbH · US

Inventors

Simon Diemer · Lauchheim, DE
Hubert Mantz · Neu-Ulm, DE
Jaroslaw Paluszynski · Oberkochen, DE

Key dates

Filing date	Sep 29, 2011
Grant date	Jul 16, 2013
Priority date	—
Expiry date	Jan 30, 2032

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/28
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A method for operating a particle beam microscope comprising detecting light rays or particles which emanate from a structure, wherein the structure comprises at least one of: at least a portion of a surface of an object and at least a portion of a surface of an object holder of the particle beam microscope; generating a surface model of the structure depending on the at least one of the detected light rays and the particles; determining a position and an orientation of the surface model of the structure relative to the object region; determining a measurement location relative to the surface model of the structure; and positioning the object depending on the generated surface model of the structure, depending on the determined position and orientation of the surface model of the structure, and depending on the determined measurement location.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.