Micromechanical yaw-rate sensor

US8490483B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Martin Wrede · Reutlingen, DE
• Johannes Classen · Reutlingen, DE
• Torsten Ohms · Lambach, DE
• Carsten Geckeler · Lörrach, DE
• Burkhard Kuhlmann · Reutlingen, DE
• Jens Frey · Echterdingen, DE
• Daniel Christoph Meisel · Pittsburgh, US
• Joerg Hauer · Reutlingen, DE
• Thorsten Balslink · Kirchentellinsfurt, DE

Key dates

• Filing date: Jul 13, 2010
• Grant date: Jul 23, 2013
• Expiry date: Jun 3, 2031

Classification

• Technology area (CPC G): Physics
• CPC primary: G01C19/5747
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A micromechanical yaw-rate sensor comprising a first yaw-rate sensor element, which outputs a first sensor signal, which contains information about a rotation around a first rotational axis, a second yaw-rate sensor element, which outputs a second sensor signal, which contains information about a rotation around a second rotational axis, which is perpendicular to the first rotational axis, a drive, which drives the first yaw-rate sensor element, and a coupling link, which mechanically couples the first yaw-rate sensor element and the second yaw-rate sensor element to one another, so that driving of the first yaw-rate sensor element also causes driving of the second yaw-rate sensor element.