Apparatus and method for active voltage compensation of electrostatic discharge of a substrate
US8493084B2 · kind B2 · utility
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11References
5Claims
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Key dates
| Filing date | Oct 21, 2009 |
| Grant date | Jul 23, 2013 |
| Priority date | — |
| Expiry date | Jul 3, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2893
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A voltage compensation assembly adapted for apparatus having a prober for contacting the electronic elements on a substrate is described. The voltage compensation assembly includes a controller connected to the prober and adapted for active voltage compensation, and a voltage measuring unit connected to the controller and for measuring a voltage on the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.