On-the fly laser beam path dithering for enhancing throughput
US8497450B2 · kind B2 · utility
8Cited by
93References
45Claims
0Family size
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Key dates
| Filing date | Oct 26, 2007 |
| Grant date | Jul 30, 2013 |
| Priority date | — |
| Expiry date | Jan 13, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/101
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A laser-based workpiece processing system includes sensors connected to a sensor controller that converts sensor signals into focused spot motion commands for actuating a beam steering device, such as a two-axis steering mirror. The sensors may include a beam position sensor for correcting errors detected in the optical path, such as thermally-induced beam wandering in response to laser or acousto-optic modulator pointing stability, or optical mount dynamics.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.