Micro electrical mechanical system
US8497577B2 · kind B2 · utility
0Cited by
14References
3Claims
0Family size
Assignee
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Key dates
| Filing date | Oct 10, 2007 |
| Grant date | Jul 30, 2013 |
| Priority date | — |
| Expiry date | Jun 30, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/16235
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
An apparatus includes a Micro Electrical Mechanical System (MEMS) having electrical contacts and a MEMS device in electrical communication with the electrical contacts. A lid is oriented over the MEMS device and not the electrical contacts. The lid has a base region and a top region, the base region being wider in dimension than the top region and oriented in closer proximity to the MEMS device than the top region.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.