Coating compositions for use with an overcoated photoresist
US8501383B2 · kind B2 · utility
4Cited by
3References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 18, 2010 |
| Grant date | Aug 6, 2013 |
| Priority date | — |
| Expiry date | Jul 2, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/091
- WIPO fieldOrganic fine chemistry
- WIPO sectorChemistry
Abstract
Cyanurate compositions are provided that are particularly useful as a reagent to form a resin component of a coating composition underlying an overcoated photoresist. Preferred isocyanurates compound comprise substitution of multiple cyanurate nitrogen ring atoms by at least two distinct carboxy and/or carboxy ester groups.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.