Patent · US Active

Charged particle beam analysis while part of a sample to be analyzed remains in a generated opening of the sample

US8502142B2 · kind B2 · utility

0Cited by

12References

23Claims

0Family size

Assignee

Carl Zeiss Microscopy GmbH · DE

Inventors

Ulrike Zeile · Heidenheim, DE
Dietmar Dönitz · Aalen, DE

Key dates

Filing date	Sep 15, 2009
Grant date	Aug 6, 2013
Priority date	—
Expiry date	Sep 15, 2029

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/31745
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A device and method for analyzing a sample provide for extracting a part to be analyzed from the sample with the aid of a previously generated opening in the sample. The part to be analyzed is examined in greater detail with the aid of a particle beam. For this purpose, the sample is placed in the opening or on a sample holder.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.