Patent · US Active

Microbolometer detector layer

US8502147B2 · kind B2 · utility

1Cited by
9References
23Claims
0Family size

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Inventors

Key dates

Filing dateOct 4, 2011
Grant dateAug 6, 2013
Priority date
Expiry dateOct 27, 2031

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01J5/20
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A microbolometer is disclosed, including a bottom dielectric of a bridge structure; a detector layer disposed above the bottom dielectric, the detector layer comprised of a metal-doped vanadium pentaoxide material; and a top dielectric disposed above the detector layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.