Microbolometer detector layer
US8502147B2 · kind B2 · utility
1Cited by
9References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 4, 2011 |
| Grant date | Aug 6, 2013 |
| Priority date | — |
| Expiry date | Oct 27, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J5/20
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A microbolometer is disclosed, including a bottom dielectric of a bridge structure; a detector layer disposed above the bottom dielectric, the detector layer comprised of a metal-doped vanadium pentaoxide material; and a top dielectric disposed above the detector layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.