Dose-data generating apparatus, dose-data generating method, and manufacturing method of semiconductor device
US8504951B2 · kind B2 · utility
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12References
8Claims
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Key dates
| Filing date | Jun 24, 2011 |
| Grant date | Aug 6, 2013 |
| Priority date | — |
| Expiry date | Jun 24, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67253
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
According to one embodiment, generating virtual data by mirroring data based on a dimension measurement result in a measurement region on an inner side of a shot region to a non-shot region on an outer side of a shot edge, and calculating dose data of the measurement region and a non-measurement region based on data in the measurement region and the virtual data are included.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.