Method and structure of monolithetically integrated microneedle biochip
US8506529B1 · kind B1 · utility
16Cited by
3References
8Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 9, 2009 |
| Grant date | Aug 13, 2013 |
| Priority date | — |
| Expiry date | Nov 21, 2031 |
Classification
- Technology area (CPC A)Human Necessities
- CPC primaryA61B5/14865
- WIPO fieldMedical technology
- WIPO sectorInstruments
Abstract
The present invention provides a method and device using CMOS and MEMS fabrication techniques for making an integrated microneedle device with integrated circuits. Merely by way of example, the technology can be applied to bio and chemical sensing, and other bioMEMS applications. In some embodiments, the integrated circuits are completed using standard IC processes. For example, an array of microneedles are fabricated on top of the IC substrate followed by formation of micro fluidic channels in the substrate. On-chip integrated circuits enable real-time sensing and intelligent drug delivery.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.