Microengineered multipole ion guide
US8507847B2 · kind B2 · utility
15Cited by
18References
24Claims
0Family size
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Key dates
| Filing date | Mar 22, 2011 |
| Grant date | Aug 13, 2013 |
| Priority date | — |
| Expiry date | Jun 4, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J49/0018
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A microengineered multipole ion guide for use in miniature mass spectrometer systems is described. Exemplary methods of mounting rods in hexapole, octupole, and other multipole geometries are described. The rods forming the ion guide are supported in etched silicon structures defined in at least first and second substrates.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.