Patent · US Active

Homogenizer

US8508716B2 · kind B2 · utility

4Cited by

0References

11Claims

0Family size

Assignee

ASML NETHERLANDS B.V. · NL

Inventors

Bert Claessens · Spalbeek, BE
Marcel Mathijs Theodore Marie Dierichs · Venlo, NL
Herman Philip Godfried · Amsterdam, NL

Key dates

Filing date	Oct 21, 2010
Grant date	Aug 13, 2013
Priority date	—
Expiry date	Aug 26, 2031

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70075
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A two-stage homogenizer comprising a first homogenizer stage and a second homogenizer stage. The first homogenizer stage includes a pair of microlens arrays and associated focusing optics. The second homogenizer stage includes a second pair of microlens arrays and associated focusing optics. The second homogenizer stage is positioned to receive radiation which is output from the first homogenizer stage.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.