Pressure transducer having structure for monitoring surface charge
US8511170B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 18, 2010 |
| Grant date | Aug 20, 2013 |
| Priority date | — |
| Expiry date | Mar 24, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/069
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure transducer includes a substrate, a piezoresistive element, a first conductive element, a first terminal, and a test structure. The substrate has a surface and a cavity. A diaphragm layer is formed over the cavity and over the surface of the substrate. The piezoresistive element is formed in the diaphragm layer. The first conductive element is formed in the diaphragm layer, and has a first conductivity type. The first conductive element is coupled to the piezoresistive element. The first terminal is formed over a surface of the diaphragm layer and coupled to the first conductive element. The test structure has the first conductivity type and is formed in the diaphragm layer. The test structure has an edge spaced apart from an edge of the first conductive element by a predetermined distance. A surface charge accumulation on the diaphragm layer is detected using the test structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.