Enhanced state estimation based upon information credibility
US8515567B2 · kind B2 · utility
1Cited by
6References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 21, 2005 |
| Grant date | Aug 20, 2013 |
| Priority date | — |
| Expiry date | Nov 22, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B13/024
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A method, apparatus, and a system for performing an adaptive state estimation process for processing semiconductor wafers. A processing of a first workpiece is controlled using a process controller and a processing tool. Manufacturing data relating to the processing of the first workpiece is acquired. Status data relating to the manufacturing data is acquired. The status data includes data relating to the source of the manufacturing data. A state of a process controller or a processing tool is determined based upon the status data and the manufacturing data.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.