XY stage device, semiconductor inspection apparatus, and semiconductor exposure apparatus
US8517363B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 17, 2010 |
| Grant date | Aug 27, 2013 |
| Priority date | — |
| Expiry date | Mar 31, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/682
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
An XY stage device having an X-axis movable body which moves in the X-axis direction on a platen, and a Y-axis movable body which moves in the Y-axis direction on the platen and guides the movement of the X-axis movable body in the X-axis direction. The XY stage device includes a pair of actuators which can be provided so as to be separated from each other in the X-axis direction, and drives the Y-axis movable body in the Y-axis direction, a detector which detects the yawing angle that can be the angle of the Y-axis movable body in a rotational direction around the Z-axis, a controller which controls the driving of the pair of actuators on the basis of the yawing angle detected by the detector, and a pair of supporters which supports the Y-axis movable body on the platen. One of the pair of supporters can be a rolling guide which guides the movement of the Y-axis movable body in the Y-axis direction, and the other of the pair of supporters can be an air pad which supports the Y-axis movable body in non-contact with the platen.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.