Method for making electrical interconnections with carbon nanotubes
US8518816B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Mar 24, 2010 |
| Grant date | Aug 27, 2013 |
| Priority date | — |
| Expiry date | Mar 24, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2221/1094
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method for making electrical interconnections of carbon nanotubes, including a) depositing an ionic liquid including nanoparticles of at least one suspended electrically conducting material, covering at least one surface of an element configured to be used as a support for carbon nanotubes, b) forming a deposit of the nanoparticles at least against the surface of the element, c) removing the remaining ionic liquid, d) growing carbon nanotubes from the deposited nanoparticles, and further including between the c) removing the remaining ionic liquid and the d) growing carbon nanotubes, passivating the deposited nanoparticles not found against the surface of the element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.