Patent · US Active

Vacuum processing apparatus

US8522958B2 · kind B2 · utility

4Cited by

5References

9Claims

0Family size

Assignees

TOKYO ELECTRON LIMITED · JP
Sinfonia Technology Co., Ltd. · JP

Inventors

Yasuhiro Tobe · Rifu, JP
Satoru Kawakami · Sagamihara, JP
Shinji Matsubayashi · Tokyo, JP
Yosuke Muraguchi · Ise, JP
Yasuyoshi Kitazawa · Tokyo, JP
Yasumichi Mieno · Minato, JP

Key dates

Filing date	May 19, 2009
Grant date	Sep 3, 2013
Priority date	—
Expiry date	Jul 9, 2030

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB65G2249/045
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

An object is to provide a vacuum processing apparatus that is capable of suppressing the costs and making control easy. Provided is a vacuum processing apparatus that includes a vacuum section (2) of which inside is held in vacuum, a placing section (3) that is disposed inside the vacuum section (2) and is capable of placing a workpiece thereon, a linear motor 4) that includes coils (415) and makes the placing section (3) travel within the vacuum section, wherein air is placed inside the placing section (3) while being isolated from the vacuum section (2), and the coils (415) of the linear motor (4) are disposed inside the placing section (3).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.