Mechanical light modulators with stressed beams
US8526096B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 12, 2009 |
| Grant date | Sep 3, 2013 |
| Priority date | — |
| Expiry date | Feb 12, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG09G2320/0633
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
The invention relates to a spatial light modulator including a substrate having a surface and a modulation assembly coupled to the substrate including a modulation element and a compliant beam. The modulation assembly is configured to limit the bending of the compliant beam towards an opposing surface that would otherwise be caused by inherent stresses within the compliant beam. The invention also relates to a method of manufacturing a spatial light modulator including the steps of forming and releasing a modulation assembly that has a modulation element and a compliant beam formed in a pre-release position to have an intended inherent stress state. As a result of the stress state in the compliant beam, upon release of the compliant beam, the compliant beam bends into a rest position which is different than the pre-release position, where the rest position is based in part on the intended inherent stress state.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.