Apparatus for attaching substrates and gap control unit thereof
US8529715B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 4, 2013 |
| Grant date | Sep 10, 2013 |
| Priority date | — |
| Expiry date | Mar 4, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/133354
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An apparatus for attaching substrates includes a first chamber for supporting a first substrate and a second chamber for supporting a second substrate. A main seal member is placed between the first chamber and the second chamber so as to maintain a seal and a gap between the chambers. An alignment control part is placed between the first chamber and the second chamber so as to maintain the seal, and also to allow the second chamber to move with respect to the first chamber in order to align the substrates. The alignment control part may also control a gap between the chambers, to thereby maintain a uniform gap between the substrates.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.