Patent assignee · KR · COMPANY

ADP Engineering Co., Ltd.

18Patents
18Active
18Granted
50Portfolio score

Filing activity: Aug 20, 2007 → Mar 4, 2013 · 15 expiring within 5 years

Most-cited patents

PatentTitleAreaCited byStatus
US8845810B2 Substrate damage prevention system and method Electricity 47 Active
US7988817B2 Lift pin driving device and a flat panel display manufacturing apparatus having same Emerging Cross-Sectional Technologies 37 Active
US7750818B2 System and method for introducing a substrate into a process chamber Emerging Cross-Sectional Technologies 11 Active
US7980287B2 Adhesive chuck and substrate bonding apparatus Emerging Cross-Sectional Technologies 8 Active
US7765682B2 Apparatus for attaching substrates Emerging Cross-Sectional Technologies 6 Active
US8462009B2 System and method for introducing a substrate into a process chamber Emerging Cross-Sectional Technologies 5 Active
US7896046B2 Substrate bonding apparatus having alignment unit and method of aligning substrates using the same Emerging Cross-Sectional Technologies 4 Active
US7770478B2 Apparatus and method for measuring chuck attachment force Electricity 3 Active
US8617314B2 Organic deposition apparatus and method of depositing organic substance using the same Chemistry; Metallurgy 3 Active
US8462008B2 System and method for introducing a substrate into a process chamber Emerging Cross-Sectional Technologies 3 Active
US7864289B2 Apparatus and method for attaching substrates Physics 1 Active
US8388781B2 Apparatus for attaching substrates and gap control unit thereof Physics 1 Active
US8529715B2 Apparatus for attaching substrates and gap control unit thereof Physics 0 Active
US8072573B2 Apparatus and method for attaching substrates Physics 0 Active
US8363377B2 Electrostatic chuck and apparatus having the same Electricity 0 Active
US8256101B2 Apparatus for attaching substrates of flat display panel Emerging Cross-Sectional Technologies 0 Active
US7640960B2 Apparatus for attaching substrates Emerging Cross-Sectional Technologies 0 Active
US8834673B2 Process chamber having gate slit opening and closing apparatus Electricity 0 Active

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.