ADP Engineering Co., Ltd.
18Patents
18Active
18Granted
50Portfolio score
Filing activity: Aug 20, 2007 → Mar 4, 2013 · 15 expiring within 5 years
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8845810B2 | Substrate damage prevention system and method | Electricity | 47 | Active |
| US7988817B2 | Lift pin driving device and a flat panel display manufacturing apparatus having same | Emerging Cross-Sectional Technologies | 37 | Active |
| US7750818B2 | System and method for introducing a substrate into a process chamber | Emerging Cross-Sectional Technologies | 11 | Active |
| US7980287B2 | Adhesive chuck and substrate bonding apparatus | Emerging Cross-Sectional Technologies | 8 | Active |
| US7765682B2 | Apparatus for attaching substrates | Emerging Cross-Sectional Technologies | 6 | Active |
| US8462009B2 | System and method for introducing a substrate into a process chamber | Emerging Cross-Sectional Technologies | 5 | Active |
| US7896046B2 | Substrate bonding apparatus having alignment unit and method of aligning substrates using the same | Emerging Cross-Sectional Technologies | 4 | Active |
| US7770478B2 | Apparatus and method for measuring chuck attachment force | Electricity | 3 | Active |
| US8617314B2 | Organic deposition apparatus and method of depositing organic substance using the same | Chemistry; Metallurgy | 3 | Active |
| US8462008B2 | System and method for introducing a substrate into a process chamber | Emerging Cross-Sectional Technologies | 3 | Active |
| US7864289B2 | Apparatus and method for attaching substrates | Physics | 1 | Active |
| US8388781B2 | Apparatus for attaching substrates and gap control unit thereof | Physics | 1 | Active |
| US8529715B2 | Apparatus for attaching substrates and gap control unit thereof | Physics | 0 | Active |
| US8072573B2 | Apparatus and method for attaching substrates | Physics | 0 | Active |
| US8363377B2 | Electrostatic chuck and apparatus having the same | Electricity | 0 | Active |
| US8256101B2 | Apparatus for attaching substrates of flat display panel | Emerging Cross-Sectional Technologies | 0 | Active |
| US7640960B2 | Apparatus for attaching substrates | Emerging Cross-Sectional Technologies | 0 | Active |
| US8834673B2 | Process chamber having gate slit opening and closing apparatus | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.