Large area patterning of nano-sized shapes

US8529778B2 · kind B2 · utility

Assignees

• Molecular Imprints, Inc. · US
• The Board of Regents of the University of Texas System · US

Inventors

• Sidlgata V. Sreenivasan · Austin, US
• Shuqiang Yang · Austin, US
• Frank Y. Xu · Round Rock, US
• Dwayne L. LaBrake · Austin, US

Key dates

• Filing date: Nov 12, 2009
• Grant date: Sep 10, 2013
• Expiry date: Aug 19, 2031

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/0002
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

Methods for creating nano-shaped patterns are described. This approach may be used to directly pattern substrates and/or create imprint lithography molds that may be subsequently used to directly replicate nano-shaped patterns into other substrates in a high throughput process.