Middle layer of die structure that comprises a cavity that holds an alkali metal

US8530249B2 · kind B2 · utility

Assignee

• NORTHROP GRUMMAN SYSTEMS CORPORATION · US

Inventors

• Henry C. Abbink · Westlake Village, US
• William P. Debley · San Fernando, US
• Christine Geosling · Calabasas, US
• Daryl K. Sakaida · Simi Valley, US
• Robert E. Stewart · Calabasas, US

Key dates

• Filing date: May 16, 2011
• Grant date: Sep 10, 2013
• Expiry date: Dec 19, 2031

Classification

• Technology area (CPC G): Physics
• CPC primary: G04F5/14
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

In one implementation, a chamber is selected that accommodates an array of die structures that comprises one or more cavities. An inner chamber of the chamber is maintained at a first temperature. An alkali metal source of the chamber is maintained at a second temperature greater than the first temperature. An outer chamber of the chamber is maintained at a third temperature greater than the first temperature and the second temperature. The one or more cavities of the array of die structures are filled with a portion of the alkali metal source. The one or more cavities of the array of die structures are sealed to comprise the portion of the alkali metal source.