Apparatus and method for electrostatic discharge (ESD) reduction
US8531198B2 · kind B2 · utility
0Cited by
4References
21Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 16, 2010 |
| Grant date | Sep 10, 2013 |
| Priority date | — |
| Expiry date | Oct 30, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6833
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A substrate support unit adapted for a system for testing or processing of a substrate is provided. The substrate support unit includes a support table having at least one substrate carrier structure adapted to support a substrate, wherein the substrate carrier structure is electrically floating with respect to ground.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.