Patent · US Active

Probe card test apparatus and method

US8531202B2 · kind B2 · utility

14Cited by

12References

25Claims

0Family size

Assignee

VeraConnex, LLC · US

Inventors

Sammy Mok · Cupertino, US
Frank Swiatowiec · San Jose, US
Fariborz Agahdel · San Jose, US

Key dates

Filing date	Oct 10, 2008
Grant date	Sep 10, 2013
Priority date	—
Expiry date	May 28, 2030

Classification

Technology area (CPC G)Physics
CPC primaryG01R35/00
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A probe card analyzer mounts on a probe card in a wafer prober and a use a fixture in the wafer probe and switch electronics in place of an ATE head. Methods of testing can confirm that probe cards are operating within their specifications over large temperature ranges and the mechanical force ranges seen in real manufacturing environments. This reduces the cost and improves the accuracy and speed of analyzing probe cards and improves diagnosing problems with probe cards.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.