Front side implanted guard ring structure for backside illuminated image sensor
US8531565B2 · kind B2 · utility
11Cited by
62References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 23, 2010 |
| Grant date | Sep 10, 2013 |
| Priority date | — |
| Expiry date | Mar 17, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10F39/811
Abstract
An image sensor includes a semiconductor substrate, a guard ring structure in the substrate, and at least one pixel surrounded by the guard ring structure. The guard ring structure is implanted in the substrate by high-energy implantation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.