Patent · US Active

Apparatus for providing a rotation carrier magazine, and method of operating thereof

US8534976B2 · kind B2 · utility

2Cited by

27References

16Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Reiner Gertmann · Gelnhausen, DE
Michael König · Frankfurt, DE

Key dates

Filing date	Oct 28, 2010
Grant date	Sep 17, 2013
Priority date	—
Expiry date	Jan 3, 2031

Classification

Technology area (CPC H)Electricity
CPC primaryH01L21/67769
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

An apparatus for supporting a plurality of carriers or substrates is described. The apparatus includes a vacuum chamber and a rotatable support for supporting the plurality of carriers or substrates, wherein the support is provided within the vacuum chamber and is configured for rotating the supported plurality of carriers or substrates around a rotation axis.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.