Patent · US Active

Method and apparatus for merging multiple geometrical pixel images and generating a single modulator pixel image

US8539395B2 · kind B2 · utility

10Cited by

5References

11Claims

0Family size

Assignee

Micronic Laser Systems AB · SE

Inventors

Lars Ivansen · Solna, SE
Anders Osterberg · Täby, SE

Key dates

Filing date	Mar 2, 2011
Grant date	Sep 17, 2013
Priority date	—
Expiry date	Apr 8, 2031

Classification

Technology area (CPC G)Physics
CPC primaryG06F30/00
WIPO fieldOptics
WIPO sectorInstruments

Abstract

The present invention relates to customizing individual workpieces, such as chip, flat panels or other electronic devices produced on substrates, by direct writing a custom pattern. Customization can be per device, per substrate, per batch or at some other small volume that makes it impractical to use a custom mask or mask set. In particular, it relates to customizing a latent image formed in a radiation sensitive layer over a substrate, merging standard and custom pattern data to form a custom pattern used to produce the customized latent image. A wide variety of substrates can benefit from the technology disclosed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.