Method and apparatus for cross-section processing and observation
US8542275B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 13, 2010 |
| Grant date | Sep 24, 2013 |
| Priority date | — |
| Expiry date | Oct 2, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N23/2255
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A cross-section processing and observation method includes: forming a first cross section in a sample by etching processing using a focused ion beam; obtaining image information of the first cross section by irradiating the focused ion beam to the first cross section; forming a second cross section by performing etching processing on the first cross section; obtaining image information of the second cross section by irradiating the focused ion beam to an irradiation region including the second cross section; displaying image information of a part of a display region of the irradiation region from the image information of the second cross section; displaying the image information of the first cross section by superimposing it on the image information being displayed; and moving the display region within the irradiation region. Observation images in which display regions are aligned can be obtained while reducing damage to the sample.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.