Patent · US Active

Method and apparatus for thermal analysis of through-silicon via (TSV)

US8543952B2 · kind B2 · utility

3Cited by
11References
20Claims
0Family size

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Key dates

Filing dateNov 4, 2011
Grant dateSep 24, 2013
Priority date
Expiry dateNov 4, 2031

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG06F2119/08
  • WIPO fieldComputer technology
  • WIPO sectorElectrical engineering

Abstract

Some embodiments of the invention provide a method for performing thermal analysis of an integrated circuit (“IC”) design layout. The IC design layout includes several wiring layers in some embodiments. The IC design layout includes a substrate that has at least one through-silicon via (“TSV”). The method divides the IC design layout into a set of elements. The method identifies a temperature distribution for the IC design layout by using the set of elements. In some embodiments, at least one element includes a metal component and a non-metal component. The non-metal component is silicon in some embodiments, and a dielectric in other embodiments.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.