Micromechanical housing comprising at least two cavities having different internal pressure and/or different gas compositions and method for the production thereof

US8546928B2 · kind B2 · utility

Assignee

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

• Peter Merz · Hanerau-Hademarschen, DE
• Wolfgang Reinert · Neumünster, DE
• Marten Oldsen · Kleve, DE
• Oliver Schwarzelbach · Itzehoe, DE

Key dates

• Filing date: Apr 4, 2007
• Grant date: Oct 1, 2013
• Expiry date: Jan 12, 2028

Classification

• Technology area (CPC G): Physics
• CPC primary: G01C19/5783
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

The present application relates to a multiple component which is to be subsequently individualized by forming components containing active structures, in addition to a corresponding component which can be used in microsystem technology systems. The multiple component and/or component comprises a flat substrate and also a flat cap structure which are bound to each other such that they surround at least one first and one second cavity per component, which are sealed against each other and towards the outside. The first of the two cavities is provided with getter material and due to the getter material has a different internal pressure and/or a different gas composition than the second cavity. The present application also relates to a method for producing the type of component and/or components for which gas mixtures of various types of gas have a different absorption ratio in relation to the getter material.